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Absolute micro pressure measurements based on a high-overload-resistance sensor

โœ Scribed by Meng, Xiawei; Jiang, Zhuangde; Zhao, Yulong; Yu, Zhongliang; Tian, Bian


Book ID
125813262
Publisher
The Institution of Engineering and Technology
Year
2012
Tongue
English
Weight
350 KB
Volume
7
Category
Article
ISSN
1750-0443

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A low pressure meter based on a capaciti
โœ L. Kaabi; J. Sakly; M. Saafi ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier ๐ŸŒ English โš– 502 KB

An implementation of a low pressure meter based on a capacitive micro sensor is exposed in this paper. In the first part, we presented the analysed sensor's structure and the developed theoretical model that permits to simulate the variation of its capacitance under applied absolute pressure. Keepin