A low pressure meter based on a capaciti
โ
L. Kaabi; J. Sakly; M. Saafi
๐
Article
๐
2009
๐
Elsevier
๐
English
โ 502 KB
An implementation of a low pressure meter based on a capacitive micro sensor is exposed in this paper. In the first part, we presented the analysed sensor's structure and the developed theoretical model that permits to simulate the variation of its capacitance under applied absolute pressure. Keepin