Abnormal silicon oxide growth on cobalt silicide in arsenic-doped N+ active areas

✍ Scribed by Won Gyu Lee; Nak Kyun Sung; Ihl Hyun Cho; Hyuk Hyun Ryu

• Book ID: 117357639
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 558 KB
• Volume: 57
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/s0167-577x(03)00126-5