✦ LIBER ✦
Ablative photodecomposition of polymer films by pulsed far-ultraviolet (193 nm) laser radiation: Dependence of etch depth on experimental conditions
✍ Scribed by Srinivasan, R. ;Braren, Bodil
- Publisher
- John Wiley and Sons
- Year
- 1984
- Weight
- 406 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0360-6376
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