Ablation of wide band-gap materials by multi-wavelength irradiation using a VUV Raman laser

✍ Scribed by Koji Sugioka; Satoshi Wada; Hideo Tashiro; Koichi Toyoda

• Book ID: 108418351
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 224 KB
• Volume: 109-110
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(96)00656-3