✦ LIBER ✦
Ablation of thin polymer films on Si or metal substrate with the low intensity UV beam of an excimer laser or mercury lamp: advantages of ellipsometric rate measurements
✍ Scribed by Matthias Bolle; Sylvain Lazare
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 392 KB
- Volume
- 54
- Category
- Article
- ISSN
- 0169-4332
No coin nor oath required. For personal study only.