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Ab initio pseudopotential calculations of dopant diffusion in Si

✍ Scribed by Jing Zhu

Book ID: 117627295
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 159 KB
Volume: 12
Category: Article
ISSN: 0927-0256
DOI: 10.1016/s0927-0256(98)00023-8

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