✦ LIBER ✦
A yield calculation method for LSI arrays considering a defect distribution towards a wafer radius : T. Okabe and M. Nagata. Trans. Inst. Electron. Commun. Engrs Japan55C, No. 3, March (1972), p. 157
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 114 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0026-2714
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