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A waveguiding layer formed by H+ implantation in LiNbO3

✍ Scribed by Tianhao Shao; Xinyuan Jinag; L Zhang; Xiqi Feng


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
181 KB
Volume
43
Category
Article
ISSN
0042-207X

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Optical Waveguide in X-Cut LiNbO3 Crysta
✍ Chen, Feng ;Hu, Hui ;Zhang, Jian-Hua ;Lu, Fei ;Shi, Bo-Rong ;Wang, Ke-Ming ;Shen πŸ“‚ Article πŸ“… 2001 πŸ› John Wiley and Sons 🌐 English βš– 115 KB πŸ‘ 1 views

The X-cut, Y-propagation LiNbO 3 crystals were implanted by 2.8 MeV P ΓΎ ions with doses of $1 Γ‚ 10 14 ions/cm 2 at room temperature. Planar optical waveguides were formed by P + implantation at doses of 1 Γ‚ 10 14 , 2 Γ‚ 10 14 , 3 Γ‚ 10 14 and 4 Γ‚ 10 14 ions/cm 2 . Contrary to high-dose ion-implanted w