✦ LIBER ✦

A wafer-capped, high-lifetime ohmic MEMS RF switch

✍ Scribed by J. Lampen; S. Majumder; R. Morrison; A. Chaudhry; J. Maciel

Publisher: John Wiley and Sons
Year: 2004
Tongue: English
Weight: 513 KB
Volume: 14
Category: Article
ISSN: 1096-4290
DOI: 10.1002/mmce.20020

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✦ Synopsis

An electrostatically actuated broadband ohmic microswitch has been developed for RF and microwave applications. The switch is a three-terminal device based on a cantilever beam and is fabricated using an all-metal, surface-micromachining process. It operates in a hermetic environment obtained through a glass frit wafer-bonding process. RF lifetimes greater than 10 10 cycles have been achieved for the wafer capped switch. Typical insertion loss and isolation for a 2-contact switch at 10 GHz are 0.4 and 20 dB, respectively, while the 8-contact switch yields an insertion loss and isolation of 0.2 dB and 27 dB at 2 GHz, respectively.

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