A versatile WIBS 200 kV ion implanter for materials modification

✍ Scribed by P. Bond; D. Duckworth; R.G. Elliman; R. Henshaw; S.T. Johnson; M.C. Ridgway; R.P. Thornton; J.S. Williams; P. Byers; D.J. Chivers

• Book ID: 113282434
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 557 KB
• Volume: 55
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(91)96222-7