✦ LIBER ✦
A versatile two-dimensional ion implantation simulator incorporated in an integrated process simulation system
✍ Scribed by Yasuko Takano; Masanori Ohgo; Shuichi Yamamoto; Hideo Sunami
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 690 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0167-9317
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