A versatile system for controlled electron-beam deposition of thin films : M. Oron. Vacuum21, No. 8 (1971), p. 315

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 53 KB
• Volume: 11
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(72)90691-9