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A vacuum system for the production of clean carbon films

✍ Scribed by Lamvik, M. K. ;Voreades, D. ;Norton, P. ;LeFurgey, A. ;Ingram, P.

Publisher
Wiley (John Wiley & Sons)
Year
1987
Tongue
English
Weight
419 KB
Volume
5
Category
Article
ISSN
0741-0581

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✦ Synopsis

A compact, oil-free vacuum system has been assembled for the production of thin carbon films. Carbon rods are held in a simply constructed and easily cleaned rod holder. Using an unlubricated mechanical roughing pump and one sorption pump, the system is evacuated to the low millitorr range while completely avoiding oil vapors and contaminants that might derive from pump oil. Films produced in such systems are hydrophilic, and analytical electron microscopy measurements have shown that these films are adequately smooth and free of contaminants of both high and low atomic number.

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