A two-way membrane-type micro-actuator with continuous deflections

✍ Scribed by Hsu, Chenpeng; Hsu, Wensyang; Hsu, Chenpeng

• Book ID: 120242566
• Publisher: Institute of Physics
• Year: 2000
• Tongue: English
• Weight: 466 KB
• Volume: 10
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/10/3/313