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A two-way membrane-type micro-actuator with continuous deflections

โœ Scribed by Hsu, Chenpeng; Hsu, Wensyang; Hsu, Chenpeng


Book ID
120242566
Publisher
Institute of Physics
Year
2000
Tongue
English
Weight
466 KB
Volume
10
Category
Article
ISSN
0960-1317

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