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A Two-Dimensional Micro Scanner Integrated with a Piezoelectric Actuator and Piezoresistors

✍ Scribed by Zhang, Chi; Zhang, Gaofei; You, Zheng

Book ID: 120191753
Publisher: Molecular Diversity Preservation International
Year: 2009
Tongue: English
Weight: 675 KB
Volume: 9
Category: Article
ISSN: 1424-8220
DOI: 10.3390/s90100631

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