✦ LIBER ✦
A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process
✍ Scribed by Chang, S.; Sivoth, S.
- Book ID
- 127328126
- Publisher
- IEEE
- Year
- 2006
- Tongue
- English
- Weight
- 340 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0741-3106
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