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A trilayer process for the fabrication of Al phase qubits

✍ Scribed by Xue, GuangMing; Yu, HaiFeng; Tian, Ye; Deng, Hui; Liu, WeiYang; Ren, YuFeng; Yu, HongWei; Zheng, DongNing; Zhao, ShiPing

No coin nor oath required. For personal study only.

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