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A TiNiPd thin film microvalve for high temperature applications

โœ Scribed by Y Liu; M Kohl; K Okutsu; S Miyazaki

Book ID
104060726
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
283 KB
Volume
378
Category
Article
ISSN
0921-5093

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โœ Michael E Gershenson; Michael I Faley; Jana E Nevelskaya ๐Ÿ“‚ Article ๐Ÿ“… 1992 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 274 KB

The fabrication of multilayer Josephson structures based on high-T C thin films is reported. YBa2Cu3Ox thin films are prepared by in-situ rf magnetron sputtering. SIS and SNS edge junctions were produced. In the first case an intermediate layer withstands the high temperature process of the upper HT