A time-of-flight study on the nanosecond laser induced etching of Cu with Cl2at 308 nm

✍ Scribed by G. N. A. Veen; T. S. Baller; J. Dieleman

• Publisher: Springer
• Year: 1988
• Tongue: English
• Weight: 1001 KB
• Volume: 47
• Category: Article
• ISSN: 1432-0630
• DOI: 10.1007/bf00618883