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A Ti getter pump with evaporation source of TiC. On the optimum evaporation condition of titanium : S. Tabata and M. Iwata, Vacuum, 13 (10), Oct. 1963, 413–417


Publisher
Elsevier Science
Year
1964
Tongue
English
Weight
272 KB
Volume
14
Category
Article
ISSN
0042-207X

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