A wideband 8-12 GHz inline RF MEMS power sensor that is based on sensing a certain percentage of the incident microwave power coupled by a MEMS membrane is presented, and the sensor is accomplished with GaAs MMIC technology. In order to improve microwave characteristics and the frequency response of
โฆ LIBER โฆ
A three-channel thermoelectric RF MEMS power sensor for GaAs MMIC applications
โ Scribed by Zhiqiang Zhang; Xiaoping Liao
- Book ID
- 116886250
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 507 KB
- Volume
- 182
- Category
- Article
- ISSN
- 0924-4247
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This paper first presents the detection and non-detection function of an inline RF MEMS power sensor by employing two shunt capacitive MEMS switch structures. It solves a problem that regardless of whether the power sensor needed to detect the power, a certain microwave power will always be detected