✦ LIBER ✦
A thin vacuum gate valve of large aperture : (Japan) G. Horikoshi and J. Tanaka, Japan J. Appl. Phys., 2 (2), Feb. 1963, 135–136
- Publisher
- Elsevier Science
- Year
- 1964
- Tongue
- English
- Weight
- 77 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0042-207X
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