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A thermally actuated heat pump

โœ Scribed by F.X Eder


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
362 KB
Volume
5
Category
Article
ISSN
0140-7007

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๐Ÿ“œ SIMILAR VOLUMES


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โœ C. Allen Rowley; Hector Gutierrez ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 86 KB
Design and simulation of a thermally act
โœ Shumin Zhang; Wansheng Su; Mona Zaghloul ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 455 KB

The design, modeling, and optimization of a novel, thermally actuated CMOS-MEMS switch are presented in this article. This series capacitive MEMS switch solves the substrate loss and down-state capacitance degradation problems commonly plaguing MEMS switches. The switch uses finger structure for cap