A TEM study of the structure in PtSi ultrathin layers obtained on Si(100) by Pt sputtering and annealing

✍ Scribed by P. Ruterana; K. Solt; P.-A. Buffat

• Publisher: Elsevier Science
• Year: 1991
• Weight: 65 KB
• Volume: 251-252
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(91)90844-h