✦ LIBER ✦
A technique to measure the flatness of next-generation 450 mm wafers using a three-point method with an autonomous calibration function
✍ Scribed by Ikumatsu Fujimoto; Kunitoshi Nishimura; Toshiyuki Takatsuji; Young-Sik Pyun
- Book ID
- 113861483
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 746 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0141-6359
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