✦ LIBER ✦
A systematic study of the surface roughening and sputter rate variations occurring during SIMS ultrashallow depth profile analysis of Si with Cs+
✍ Scribed by P.A.W. van der Heide; M.S. Lim; S.S. Perry; J. Bennett
- Book ID
- 114166369
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 347 KB
- Volume
- 201
- Category
- Article
- ISSN
- 0168-583X
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