Analysis of the dynamic characteristics
โ
M. Modabberifar; Y. Hojjat; A. Abdullah; M. Dadkhah
๐
Article
๐
2009
๐
Elsevier Science
๐
English
โ 926 KB
This paper describes dynamic characteristics and system identification of a panel type electrostatic actuator which is used for transportation particles and dielectric sheets. The actuator is composed of parallel electrodes, an insulating thin cover-film, a supporting panel and electrode-attachment