Design for manufacturing meets advanced
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David Z. Pan; Peng Yu; Minsik Cho; Anand Ramalingam; Kiwoon Kim; Anand Rajaram;
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Article
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2008
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Elsevier Science
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English
β 422 KB
Nanometer IC designs are increasingly challenged to achieve manufacturing closure, i.e., being fabricated with high product yield due to feature miniaturizations and process variations. Realizing the critical importance of addressing manufacturability/yield during design (which is loosely termed as