✦ LIBER ✦
A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning
✍ Scribed by Wei Gao; Shuichi Dejima; Hiroaki Yanai; Kei Katakura; Satoshi Kiyono; Yoshiyuki Tomita
- Book ID
- 108252144
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 951 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0141-6359
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