✦ LIBER ✦

A substrate heater design for high temperature deposition in an oxidizing plasma

✍ Scribed by EE Inameti; MS Raven; YM Wan; BG Murray

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 247 KB
Volume: 43
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(92)90196-4

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