✦ LIBER ✦
A submicron electron-beam tester for VLSI circuits beyond the 4-Mb DRAM : F. Fox, J. Kolzer, J. Otto and E. Plies. IBM J. Res. Dev.34(2/3), 215 (1990)
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 129 KB
- Volume
- 32
- Category
- Article
- ISSN
- 0026-2714
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