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A submicrometer megabit DRAM process technology using trench capacitors

✍ Scribed by Nakajima, S.; Minegishi, K.; Miura, K.; Morie, T.; Kimizuka, M.; Mano, T.

Book ID: 114595051
Publisher: IEEE
Year: 1985
Tongue: English
Weight: 923 KB
Volume: 32
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1985.21931

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