A study on the microstructure and property development of d.c. magnetron cosputtered ternary titanium aluminium nitride coatings Part IIIeffect of substrate bias voltage and temperature

✍ Scribed by R. Wuhrer; W. Y. Yeung

• Book ID: 110335543
• Publisher: Springer
• Year: 2002
• Tongue: English
• Weight: 509 KB
• Volume: 37
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1023/a:1015299115086