✦ LIBER ✦
A study on phase transformation of As heavily implanted Si during post-processing following rapid thermal annealing
✍ Scribed by Lu Zhiheng
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 513 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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