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A study on initial oxidation of Si(100)-2×1 surfaces by coaxial impact collision ion scattering spectroscopy

✍ Scribed by M Wasekura; M Higashi; H Ikeda; A Sakai; S Zaima; Y Yasuda


Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
501 KB
Volume
159-160
Category
Article
ISSN
0169-4332

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