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A study of the interfacial layer of Al and Al(1% Si)Si contacts using a zero-layer ellipsometry model

✍ Scribed by Tien Sheng Chao; Chung Len Lee; Tan Fu Lei

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 516 KB
Volume: 35
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(92)90183-d

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