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A study of the effect of ultraviolet (UV) and vacuum ultraviolet (VUV) photons on the minority carrier lifetime of single crystal silicon processed by rapid thermal and rapid photothermal processing

✍ Scribed by S. Venkataraman; R. Singh; V. Parihar; K. F. Poole; A. Rohatgi; V. Yeludur; A. Ebong


Publisher
Springer US
Year
1999
Tongue
English
Weight
156 KB
Volume
28
Category
Article
ISSN
0361-5235

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