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A study of the corrosion behavior of TiN films

โœ Scribed by A. Erdemir; W.B. Carter; R.F. Hochman; E.I. Meletis


Publisher
Elsevier Science
Year
1985
Weight
497 KB
Volume
69
Category
Article
ISSN
0025-5416

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Size-effect on stress behavior of the Al
โœ D. Chen; Y.M. Wang; X.L. Ma ๐Ÿ“‚ Article ๐Ÿ“… 2009 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 562 KB

The stress behavior of AlN/TiN superlattice film has been studied by means of a crystal-chemical atomic dynamics simulation based on first-principles calculations. The size-effects on stress behavior are demonstrated and discussed in detail. Stress behavior depends not only on AlN thickness but also