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A study of the breakdown testing of thermal silicon oxides and the effects of preoxidation surface treatment : D. B. Kao, J. M. Delarios, C. R. Helms and B. E. Deal. 27th a. Proc. IEEE/IRPS Int. Reliab. Phys. Symp., 9 (1989)


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
128 KB
Volume
30
Category
Article
ISSN
0026-2714

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