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A study of silicon tetrafluoride reduction with hydrogen in radiofrequency discharge

โœ Scribed by Sennikov, P. G.; Golubev, S. V.; Kornev, R. A.; Mochalov, L. A.; Shilaev, A. A.

Book ID
121557604
Publisher
SP MAIK Nauka/Interperiodica
Year
2014
Tongue
English
Weight
191 KB
Volume
48
Category
Article
ISSN
0018-1439

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