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A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

✍ Scribed by Marco Battaglia; Devis Contarato; Piero Giubilato; Leo Greiner; Lindsay Glesener; Benjamin Hooberman

Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 150 KB
Volume: 579
Category: Article
ISSN: 0168-9002
DOI: 10.1016/j.nima.2007.05.276

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✦ Synopsis

This paper reports results of a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning to 50 and 40 mm. This study shows that neither their noise nor their response to ionising particles has been degraded by the thinning process. The thinned chips have been used to build a pixel beam telescope for the ALS 1.5 GeV e À beam test facility. After alignment, an extrapolation resolution better than 9 mm has been measured for a configuration of four equally spaced pixel detector planes. Published by Elsevier B.V.

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