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✦ LIBER ✦

A study of micro-structure edges with atomic force microscopy and implications for optical metrology

✍ Scribed by H. Geuther; W. Mirandé; K.-P. Schröder

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 288 KB
Volume: 23
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(94)90184-8

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