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A study of electrostatic force nonlinearities in resonant microstructures

✍ Scribed by Agarwal, Manu; Chandorkar, Saurabh A.; Mehta, Harsh; Candler, Robert N.; Kim, Bongsang; Hopcroft, Matthew A.; Melamud, Renata; Jha, Chandra M.; Bahl, Gaurav; Yama, Gary; Kenny, Thomas W.; Murmann, Boris

Book ID: 115472907
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 665 KB
Volume: 92
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2834707

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