A sputter-etching target and rotational carousel for multilayer films : A. A. Hussain et al. Vacuum, 45(1), 115 (1994)

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 110 KB
• Volume: 34
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(94)90388-3