✦ LIBER ✦
A spectroscopic investigation of growth regimes in silane-ammonia discharges used for plasma nitride deposition
✍ Scribed by S. E. Hicks; R. A. G. Gibson
- Publisher
- Springer
- Year
- 1991
- Tongue
- English
- Weight
- 690 KB
- Volume
- 11
- Category
- Article
- ISSN
- 0272-4324
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