A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites

✍ Scribed by Bin Lin; Xiao-lang Yan; Zheng Shi; Yi-wei Yang

• Book ID: 111843145
• Publisher: SP Zhejiang University Press
• Year: 2011
• Tongue: English
• Weight: 886 KB
• Volume: 12
• Category: Article
• ISSN: 1869-1951
• DOI: 10.1631/jzus.c1000219