A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure

✍ Scribed by Wei Jiang; Xin Wang; Jinwen Zhang

• Book ID: 108263063
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 712 KB
• Volume: 163
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/j.sna.2010.08.015