๐”– Bobbio Scriptorium
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A simplified fully implanted bipolar VLSI technology

โœ Scribed by Ko, W.C.; Gwo, T.C.; Yeung, P.H.; Radigan, S.J.


Book ID
114594370
Publisher
IEEE
Year
1983
Tongue
English
Weight
369 KB
Volume
30
Category
Article
ISSN
0018-9383

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Initial efforts have been made to develop a fully implanted 3 micron poly-gate NMOS technology for fabricating an 8-bit binary counter chip. The MOS transistors in the circuit, initially designed for 8 micron gate length were scaled down to 3 micron by overexposure and over-etching techniques. The p