✦ LIBER ✦
A simple two-step phosphorus doping process for shallow junctions by applying a controlled adsorption and a diffusion in an oxidising ambient
✍ Scribed by Bodo Kalkofen; Marco Lisker; Edmund P. Burte
- Book ID
- 108215103
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 94 KB
- Volume
- 114-115
- Category
- Article
- ISSN
- 0921-5107
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