A simple target holder for rf sputtering of non-machinable material: Juh Tzeng Lue, Vacuum, 32 (6), 1982, 363–365

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 355 KB
• Volume: 33
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(83)90156-2